Automated alignment for free-space optical systems based on micro-optical-electro-mechanical systems (MOEMS)

John A. Neff; Jianglong Zhang; Adisorn Tuantranont; Yijing Fu; Yung-Cheng Lee; Victor M. Bright

doi:10.1117/12.474871

17 February 2003 Automated alignment for free-space optical systems based on micro-optical-electro-mechanical systems

John A. Neff, Jianglong Zhang, Adisorn Tuantranont, Yijing Fu, Yung-Cheng Lee, Victor M. Bright

Proceedings Volume 4833, Applications of Photonic Technology 5; (2003) https://doi.org/10.1117/12.474871
Event: Applications of Photonic Technology 5, 2002, Quebec City, Canada

Abstract

The emerging technology of micro-optical-electro-mechanical systems (MOEMS) offer promise for automating the alignment of free-space optical systems, especially intra-computer optical interconnects. MOEMS-based microlenses and micromirrors have been fabricated for the purpose of providing initial system alignment and dynamic alignment.

Citation Download Citation

John A. Neff, Jianglong Zhang, Adisorn Tuantranont, Yijing Fu, Yung-Cheng Lee, and Victor M. Bright "Automated alignment for free-space optical systems based on micro-optical-electro-mechanical systems", Proc. SPIE 4833, Applications of Photonic Technology 5, (17 February 2003); https://doi.org/10.1117/12.474871

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