Paper
17 February 2003 Bolometric detectors for the Planck surveyor
Minhee Yun, Jeffrey W. Beeman, Ravinder Bhatia, James J. Bock, Warren Holmes, Leonard Hustead, Timothy Koch, Jerry L. Mulder, Andrew E. Lange, Anthony D. Turner, Larry Wild
Author Affiliations +
Abstract
The High Frequency Instrument on the NASA/ESA Planck Surveyor, scheduled for launch in 2007, will map the entire sky in 6 frequency bands ranging from 100 GHz to 857 GHz to probe Cosmic Microwave Background (CMB) anisotropy and polarization with angular resolution ranging from 9' to 5'. The HFI focal plane will contain 48 silicon nitride micromesh bolometers operating from a 100 mK heat sink. Four detectors in each of the 6 bands will detect unpolarized radiation. An additional 4 pairs of detectors will provide sensitivity to linear polarization of emission at 143, 217 and 353 GHz. We describe the fabrication process used to meet the stringent mission requirements on sensitivity, speed of response and stability.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Minhee Yun, Jeffrey W. Beeman, Ravinder Bhatia, James J. Bock, Warren Holmes, Leonard Hustead, Timothy Koch, Jerry L. Mulder, Andrew E. Lange, Anthony D. Turner, and Larry Wild "Bolometric detectors for the Planck surveyor", Proc. SPIE 4855, Millimeter and Submillimeter Detectors for Astronomy, (17 February 2003); https://doi.org/10.1117/12.459199
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Cited by 11 scholarly publications.
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KEYWORDS
Sensors

Silicon

Bolometers

Etching

Semiconducting wafers

Polarization

Ions

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