Nonlinearity-free heterodyne laser interferometer

TaeBong Eom; Jae Wan Kim; Myung-Sai Chung

doi:10.1117/12.484570

29 July 2002 Nonlinearity-free heterodyne laser interferometer

TaeBong Eom, Jae Wan Kim, Myung-Sai Chung

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484570
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

A phase encoding electronics capable of compensating the nonlinearity in a heterodyne laser interferometer is described. The system consists of the phase demodulating electronics and the nonlinearity compensating electronics. For phase demodulation, the device uses the phase-quadrature mixing technique. And, for nonlinearity compensation, the offsets, the amplitudes and the phase of two output signals from demodulator are adjusted electrically so that their Lissajous figure can be a circle. As a result, the correct phase can be obtained. The brief analysis of nonlinearity in heterodyne interferometer and the design of the phase encoding electronics are presented. The test was performed in a Michelson-type interferometer using a transverse Zeeman stabilized He-Ne laser. The experiment demonstrates that this method can encode the phase of the heterodyne interferometer with sub-nanometer accuracy.

Citation Download Citation

TaeBong Eom, Jae Wan Kim, and Myung-Sai Chung "Nonlinearity-free heterodyne laser interferometer", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484570

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