High Resolution X-Ray-Tv-Sensors

Rudolf Germer

doi:10.1117/12.967957

1 February 1985 High Resolution X-Ray-Tv-Sensors

Rudolf Germer

Proceedings Volume 0491, 16th Intl Congress on High Speed Photography and Photonics; (1985) https://doi.org/10.1117/12.967957
Event: 16th International Congress on High Speed Photography and Photonics, 1984, Strasbourg, France

Abstract

Semiconductor devices are sensitive to X-rays. Array sensors can be constructed with integrated circuits as CCD's. Their application -to X-ray imaging is discussed especially to get a high spatial resolution. This is shown to be possible with some 10 μm resolution using a CCD-sensor covered with a converter screen. Furthermore such a screen protects the CCD against radiation damage. It could be demonstrated that soft X-radiation produces most of the damage. The life time of a sensor can be enhanced by a factor of more than 100 if a converter screen absorbs most of the soft radiation.

Citation Download Citation

Rudolf Germer "High Resolution X-Ray-Tv-Sensors", Proc. SPIE 0491, 16th Intl Congress on High Speed Photography and Photonics, (1 February 1985); https://doi.org/10.1117/12.967957

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