Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement

Osami Sasaki; Yasuhisa Shimakura; Takamasa Suzuki

doi:10.1117/12.465815

20 September 2002 Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement

Osami Sasaki, Yasuhisa Shimakura, Takamasa Suzuki

Author Affiliations +

Proceedings Volume 4919, Advanced Materials and Devices for Sensing and Imaging; (2002) https://doi.org/10.1117/12.465815
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Two-dimensional step-profile measurement is carried out with a sinusoidal wavelength-scanning interferometer where a large scanning width of 41 nm is easily achieved using a superluminescent laser diode of a wide spectral bandwidth of 46 nm. To detect a time-varying interference signal with a short integration time of 118 μs, a shutter function of a two-dimensional CCD image sensor is utilized. A step profile with a step height of 1 μm is measured with an error less than a few nanometers. A Step profile with a step height of 20 μm is also measured with a scanning width of 23 nm.

Citation Download Citation

Osami Sasaki, Yasuhisa Shimakura, and Takamasa Suzuki "Sinusoidal wavelength-scanning superluminescent diode interferometer for two-dimensional step-profile measurement", Proc. SPIE 4919, Advanced Materials and Devices for Sensing and Imaging, (20 September 2002); https://doi.org/10.1117/12.465815

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