Diffraction-based analysis of effects of fabricating and installation errors on a nano-alignment system

Yuhang Chen; Wenhao Huang

doi:10.1117/12.481517

30 August 2002 Diffraction-based analysis of effects of fabricating and installation errors on a nano-alignment system

Yuhang Chen, Wenhao Huang

Proceedings Volume 4924, Holography, Diffractive Optics, and Applications; (2002) https://doi.org/10.1117/12.481517
Event: Photonics Asia, 2002, Shanghai, China

Abstract

In the field of precision engineering, the demand for high resolution and accuracy in micro positioning and alignment is increasing. By superimposing a pair of specially coded 2-d gratings, the precise alignment between two gratings can be achieved. Based on diffraction theory, the effects introduced by several kinds offabricating and installation errors of the gratings are analyzed numerically in this paper. It is found that such grating alignment system has the function of reducing output error to an order of magnitude by averaging the fabricating errors. It's also found that varying the gap between the two gratings causes little effects on the output error and that the root-mean-square error of the output intensity increases linearly with the in-plane relative rotation angle between the gratings in small angle range.

Citation Download Citation

Yuhang Chen and Wenhao Huang "Diffraction-based analysis of effects of fabricating and installation errors on a nano-alignment system", Proc. SPIE 4924, Holography, Diffractive Optics, and Applications, (30 August 2002); https://doi.org/10.1117/12.481517

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available