Novel device of passive and fixed alignment of optical fiber using SU-8 photoresist

Jingquan Liu; Bingchu Cai; Jun Zhu; Di Chen; Yigui Li; Jiliang Zhang; Guipu Ding; Xiaolin Zhao; Chunsheng Yang

doi:10.1117/12.483159

10 September 2002 Novel device of passive and fixed alignment of optical fiber using SU-8 photoresist

Jingquan Liu, Bingchu Cai, Jun Zhu, Di Chen, Yigui Li, Jiliang Zhang, Guipu Ding, Xiaolin Zhao, Chunsheng Yang

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483159
Event: Photonics Asia, 2002, Shanghai, China

Abstract

In the microoptics field, precise alignment is very important to reduce the coupling losses in optical links. In this paper, a novel device of passive and fixed alignment of optical fiber is proposed. The rectangular V-groove formed by one sidewall of SU-8 resist and the substrate is used to position the optical fiber, and the leaf spring with flexure hinge clamps it. The spring is fabricated by the sacrificial layer technique. The clamping force provided by the spring acts on the upper semi-circle of the optical fiber's cross section, so that the device need not use the additional cover on the optical fiber to perform the vertical location and the final fixing. It has simple structure and process, and is convenient to assemble and integrate with other microparts. The coupling of two optical fibers using the devices in our experiment has less than 1.5dB insert loss.

Citation Download Citation

Jingquan Liu, Bingchu Cai, Jun Zhu, Di Chen, Yigui Li, Jiliang Zhang, Guipu Ding, Xiaolin Zhao, and Chunsheng Yang "Novel device of passive and fixed alignment of optical fiber using SU-8 photoresist", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483159

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