Finite-element analysis for simulation of layered SAW devices with xy LiNbO3 substrate

Samuel James Ippolito; Kourosh Kalantar-zadeh; Wojtek Wlodarski; David Powell

doi:10.1117/12.469080

14 November 2002 Finite-element analysis for simulation of layered SAW devices with XY LiNbO₃ substrate

Samuel James Ippolito, Kourosh Kalantar-zadeh, Wojtek Wlodarski, David Powell

Proceedings Volume 4935, Smart Structures, Devices, and Systems; (2002) https://doi.org/10.1117/12.469080
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

A finite-element method is employed to model layered Surface Acoustic Wave (SAW) two port delay lines, with a zinc oxide (ZnO) thin film guiding layer. The structure is based on x-cut, y-propagating LiNbO₃ substrate. Conditions that model the realistic electrical and mechanical boundary values are applied to the structure to analyze the electromechanical properties of the SAW device. Transient analyses are performed and the frequency responses are calculated using the FFT. Simulation results show good agreement with experimental results, indicating that a finite-element method is an appropriate approach for modeling layered SAW devices.

Citation Download Citation

Samuel James Ippolito, Kourosh Kalantar-zadeh, Wojtek Wlodarski, and David Powell "Finite-element analysis for simulation of layered SAW devices with XY LiNbO₃ substrate", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); https://doi.org/10.1117/12.469080

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