Porous silicon microcavities for sensing purposes: modeling and experimental results

Luca De Stefano; Ivo Rendina; Luigi Moretti; Andrea M. Rossi

doi:10.1117/12.468376

11 March 2003 Porous silicon microcavities for sensing purposes: modeling and experimental results

Luca De Stefano, Ivo Rendina, Luigi Moretti, Andrea M. Rossi

Proceedings Volume 4946, Transducing Materials and Devices; (2003) https://doi.org/10.1117/12.468376
Event: Photonics Fabrication Europe, 2002, Bruges, Belgium

Abstract

On exposure at different chemical substances several physical quantities of porous silicon, such as reflectivity, photoluminescence, and electrical conductivity, change drastically. In particular, we have used porous silicon microcavities as chemical sensors, measuring resonant peak shifts in the reflectivity spectra due to capillary condensation of the vapor in the silicon pores. Understanding sensor behaviour depends on the dielectric function model and on the interaction mechanism assumed. With proper choices, we can also quantitatively characterize the Porous Silicon Microcavity sensing device features.

Citation Download Citation

Luca De Stefano, Ivo Rendina, Luigi Moretti, and Andrea M. Rossi "Porous silicon microcavities for sensing purposes: modeling and experimental results", Proc. SPIE 4946, Transducing Materials and Devices, (11 March 2003); https://doi.org/10.1117/12.468376

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