Laser-assisted nanofabrication

Ming Hui Hong; Su Mei Huang; Boris S. Luk'yanchuk; Zeng Bo Wang; Yong Feng Lu; Tow Chong Chong

doi:10.1117/12.479236

17 October 2003 Laser-assisted nanofabrication

Ming Hui Hong, Su Mei Huang, Boris S. Luk'yanchuk, Zeng Bo Wang, Yong Feng Lu, Tow Chong Chong

Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.479236
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States

Abstract

Laser assisted nanofabrication for surface nanopatterning is investigated. To overcome the limitation of light wavelength, pulsed lasers were applied to combine with atomic force microscope (AFM) and nanoparticle self-assembled mask to achieve sub-30 nm patterning on the metallic surfaces. The mechanisms of the formation of nanostructure patterns are discussed. Progress on numerical simulation and physical modeling of laser assisted nanofabrication has been demonstrated. The method of AFM tip or particle enhanced laser irradiation allows the study of field enhancement effects as well as its potential applications for nanolithography.

Citation Download Citation

Ming Hui Hong, Su Mei Huang, Boris S. Luk'yanchuk, Zeng Bo Wang, Yong Feng Lu, and Tow Chong Chong "Laser-assisted nanofabrication", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); https://doi.org/10.1117/12.479236

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