Laser micromachining in the microelectronics industry: emerging applications

Pradeep K. Subrahmanyan

doi:10.1117/12.479555

17 October 2003 Laser micromachining in the microelectronics industry: emerging applications

Pradeep K. Subrahmanyan

Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.479555
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States

Abstract

Emerging applications in the microelectronics industry impose special manufacturing requirements that are not well addressed by conventional manufacturing techniques. On the other hand, advances in laser technology, optics and beam steering combined with a better understanding of laser-material interaction make laser micromachining a viable, attractive, cost-effective and in some cases enabling technology to support these applications. This paper reviews some of the emerging applications in the microelectronics industry that are well served by laser micromachining and discusses the advancements in lasers, optics and beam steering that enable cost effective laser micromachining. It also discusses some open issues that are the subject of current and future research.

Citation Download Citation

Pradeep K. Subrahmanyan "Laser micromachining in the microelectronics industry: emerging applications", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); https://doi.org/10.1117/12.479555

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