High-throughput integration of optoelectronics devices for biochip fluorescent detection

Evan P. Thrush; Ofer Levi; Ke Wang; James S. Harris Jr.; Stephen J. Smith

doi:10.1117/12.478145

17 January 2003 High-throughput integration of optoelectronics devices for biochip fluorescent detection

Evan P. Thrush, Ofer Levi, Ke Wang, James S. Harris Jr., Stephen J. Smith

Proceedings Volume 4982, Microfluidics, BioMEMS, and Medical Microsystems; (2003) https://doi.org/10.1117/12.478145
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Miniaturized, portable and robust sensing systems are required for the development of integrated biological analysis systems and their application to clinical diagnostics. This work uses vertical cavity surface emitting lasers (VCSELs), optical emission filters and PIN photodetectors to realize monolithically integrated, near infrared, fluorescence detection systems. The integration of these micro technologies with biochip applications will drastically reduce cost and allow for parallel sensing architectures, which is particularly useful for flow channel arrays such as in capillary array electrophoresis. This paper focuses on the fabrication of integrated fluorescence sensors. Fabrication procedures have been developed to realize intracavity contacted VCSELs and low noise photodetectors, such as selective AlGaAs wet etching and via planarization. A reflow process with positive photoresist has been developed to provide via electrical contacts and to optically isolate the photodetector from the light source. Three-dimensional microstructures can be simply made by this reflow technique. Optical simulations predict that a detection sensitivity lower than 10000 molecules per 10⁴μm² sample area. Single molecule detection may be possible in certain sensing architectures.

Citation Download Citation

Evan P. Thrush, Ofer Levi, Ke Wang, James S. Harris Jr., and Stephen J. Smith "High-throughput integration of optoelectronics devices for biochip fluorescent detection", Proc. SPIE 4982, Microfluidics, BioMEMS, and Medical Microsystems, (17 January 2003); https://doi.org/10.1117/12.478145

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