A micromachined deformable mirror for adaptive optics

Wilfrid Schwartz; Claire Divoux; Jacques Margail; Laurent Jocou; Julien Charton; Eric Stadler; Thomas Jager; Fabrice Casset; T. Enot

doi:10.1117/12.477924

20 January 2003 A micromachined deformable mirror for adaptive optics

Wilfrid Schwartz, Claire Divoux, Jacques Margail, Laurent Jocou, Julien Charton, Eric Stadler, Thomas Jager, Fabrice Casset, T. Enot

Author Affiliations +

Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.477924
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

The application of adaptive optics in astronomy requires increasingly compact deformable optical components with a high density of actuators, able to provide strokes of several micrometers. The main problem of the use of adaptive optics in more mainstream areas is the cost, the size and consequently the weight of the system. This paper presents the design and the results obtained with the deformable mirror under development. The system will have a continuous reflective membrane of 1 cm² driven by 64 closing gap actuators operating in contact. In the following this type of actuators is called “zipping actuators”. Applying 100 V to some 800 μm wide zipping actuators results in an electrostatic force of 100 μN and a mirror displacement of 6 μm. Recent tests of the electric behaviour show linearity between applied tension and resulting displacement as well as a good reproducibility. We also present analysis and results obtained on silicon or polymer (BCB) membranes which have to be attached on the actuator array. A preliminary assembled component made of one actuator sealed to a 5 μm thick polymer 5 × 5 mm² (BCB) membrane has demonstrated the feasibility of deforming such a small membrane by 3 μm, which is very promising.

Citation Download Citation

Wilfrid Schwartz, Claire Divoux, Jacques Margail, Laurent Jocou, Julien Charton, Eric Stadler, Thomas Jager, Fabrice Casset, and T. Enot "A micromachined deformable mirror for adaptive optics", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (20 January 2003); https://doi.org/10.1117/12.477924

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available