Fabrication of micromachined focusing mirrors with seamless reflective surface

Max Ti-Kuang Hou; Ke-Min Liao; Hong-Zhen Yeh; Bo-Wen Cheng; Pei-Yuan Hong; Rongshun Chen

doi:10.1117/12.472909

21 January 2003 Fabrication of micromachined focusing mirrors with seamless reflective surface

Max Ti-Kuang Hou, Ke-Min Liao, Hong-Zhen Yeh, Bo-Wen Cheng, Pei-Yuan Hong, Rongshun Chen

Proceedings Volume 4983, MOEMS and Miniaturized Systems III; (2003) https://doi.org/10.1117/12.472909
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A surface-micromachined focusing mirror with variable focal length, which is controlled by adjusting the mirror’s curvature, is fabricated and characterized. The bowl-shaped micromirror, which is fabricated from the micro bilayer circular plate, focuses light beam through thermal actuation of the external heat source. Both the initial and operational curvatures are manipulated by the residual stresses in two layers of the mirror. Improper stresses would lead to the failure of the bowl-shaped structure. We analyze and design geometrical dimensions for simultaneously avoiding the structure failure and increasing the tuning range of the focal length. The interferometer has been used to measure the focal length and the focusing ability. Mirrors with nominal focal lengths approximately 730 μm, and tuning ranges of about 50 microns were demonstrated. The measurement directly through optical approach has also been tried, but requires further investigation, because the laser beam affects the focusing of the micromirror seriously.

Citation Download Citation

Max Ti-Kuang Hou, Ke-Min Liao, Hong-Zhen Yeh, Bo-Wen Cheng, Pei-Yuan Hong, and Rongshun Chen "Fabrication of micromachined focusing mirrors with seamless reflective surface", Proc. SPIE 4983, MOEMS and Miniaturized Systems III, (21 January 2003); https://doi.org/10.1117/12.472909

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