New fabrication of highly dense electromagnetic field microactuators and micro-optics for MOEMS applications

Sheng-Chih Shen; Cheng-Tang Pan; Hwai-Pwu Chou; Ying-Ruel Huang

doi:10.1117/12.472900

17 January 2003 New fabrication of highly dense electromagnetic field microactuators and micro-optics for MOEMS applications

Sheng-Chih Shen, Cheng-Tang Pan, Hwai-Pwu Chou, Ying-Ruel Huang

Author Affiliations +

Proceedings Volume 4984, Micromachining Technology for Micro-Optics and Nano-Optics; (2003) https://doi.org/10.1117/12.472900
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

A novel concept of perpendicular magnetic anisotropy is applied to electromagnetic micro-optical switch (EMOS). In the study, Fe/Pt equiatomic alloy thin film is potential high-density recording media and high-energy permanent magnetic because of their exceptional magnetic properties. EMOS combines of new type Fe/Pt alloy thin film, innovative design of closed magnetic circuit and single layer planar coil. The Fe/Pt alloy thin film and magnetic circuit with close loop is applied to concentrate the magnetic flux, increase magnetic force, and decrease switching time. In this EMOS, some important features are summarized as follows: (1) high magnetic force (>68mN); (2) low work voltage (<5V); and (3) short switching time (<0.4ms). The work demonstrates that EMOS can provide excellent performance than conventional magnetic microactuator.

Citation Download Citation

Sheng-Chih Shen, Cheng-Tang Pan, Hwai-Pwu Chou, and Ying-Ruel Huang "New fabrication of highly dense electromagnetic field microactuators and micro-optics for MOEMS applications", Proc. SPIE 4984, Micromachining Technology for Micro-Optics and Nano-Optics, (17 January 2003); https://doi.org/10.1117/12.472900

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