Flexible micromirror linear array for high-resolution projection display

Francis Picard; Celine Campillo; Timothy D. Pope; Keith K. Niall; Philipp W. Peppler; Carl Larouche; Hubert Jerominek

doi:10.1117/12.472860

20 January 2003 Flexible micromirror linear array for high-resolution projection display

Francis Picard, Celine Campillo, Timothy D. Pope, Keith K. Niall, Philipp W. Peppler, Carl Larouche, Hubert Jerominek

Proceedings Volume 4985, MOEMS Display and Imaging Systems; (2003) https://doi.org/10.1117/12.472860
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

The visual displays of contemporary military flight simulators lack adequate definition to represent scenes in basic fast-jet fighter tasks. For example, air-to-air and air-to-ground targets are not projected with sufficient contrast and resolution for a pilot to perceive aspect, aspect rate and object detail at real world slant ranges. Simulator display geometries require the development of ultra-high resolution projectors with greater than 20 megapixel resolution at 60 Hz frame rate. A new micromirror device has been developed to address this requirement; it is able to modulate light intensity in an analog fashion with switching times shorter than 5 μs. When combined with a scanner, a microlaser and Schlieren optics, a linear array of these flexible micromirrors can display images composed of thousands of lines at a frame rate of 60 Hz. The approach selected for light modulation and the micromirror fabrication process flow are reviewed. Static and dynamic performances of these electrostatic MOEMS are described. Preliminary results following the integration of the described modulator into a projector prototype are reported. Developments toward a fully addressable 2000 × 1 flexible micromirror array are presented. The specifications and design of the CMOS circuit required to control this micromirror array are described. Packaging issues related to these large arrays are discussed.

Citation Download Citation

Francis Picard, Celine Campillo, Timothy D. Pope, Keith K. Niall, Philipp W. Peppler, Carl Larouche, and Hubert Jerominek "Flexible micromirror linear array for high-resolution projection display", Proc. SPIE 4985, MOEMS Display and Imaging Systems, (20 January 2003); https://doi.org/10.1117/12.472860

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