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22 July 2003 Noise: How important is it in the applications of MEMS and MOEMS?
Ananth Selvarajan
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Proceedings Volume 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology; (2003) https://doi.org/10.1117/12.510389
Event: Smart Structures and Materials, 2003, San Diego, California, United States
Abstract
There are various types of noise sources such as shot noise, thermal noise and flicker noise in electronic devices, quantum noise in photonic devices and noise due to Brownian motion in the case of MEMS which limit the performance of the systems based on these devices. In communication applications, noise causes degradation in SNR or BER leading to loss or errors in the received signal. In the case of sensor systems, noise poses a problem in terms of the minimum detectable quantity such as pressure or rotation rate or radiation field. In this paper first an overview of noise sources, noise modeling and analysis is given. Simulation results for some specific MOEM devices are presented. A comparative study of the performance of MEMS versus MOEMS for the same or similar application is also highlighted.
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Ananth Selvarajan "Noise: How important is it in the applications of MEMS and MOEMS?", Proc. SPIE 5055, Smart Structures and Materials 2003: Smart Electronics, MEMS, BioMEMS, and Nanotechnology, (22 July 2003); https://doi.org/10.1117/12.510389
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KEYWORDS
Sensors
Signal to noise ratio
Microelectromechanical systems
Microopto electromechanical systems
Waveguides
Silicon
Integrated optics
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