Calibration algorithm of unequal step phase-shifting based on checking

Shuchun Si; Yunshan Wang; Jianqiang Xu; Canlin Zhou; Chengyong Gao

doi:10.1117/12.510259

29 April 2003 Calibration algorithm of unequal step phase-shifting based on checking

Shuchun Si, Yunshan Wang, Jianqiang Xu, Canlin Zhou, Chengyong Gao

Proceedings Volume 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002; (2003) https://doi.org/10.1117/12.510259
Event: Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002, 2002, Beijing, China

Abstract

The shift step must be an accurate value in the traditional algorithm of phase-measuring profilometry technology, the result error is found in unequal step-shifting in which one or more step is not the accurate value. So the phase shifter is expensive to meet the high precision. In this paper, the software is made to give a chart of error phase in any unequal step phase-shifting, and a calibration algorithm is presented to give the correct phase based on this error-phase chart. With the help of computer emulator written by us, the calibration algorihtm based on checking proved to be correct. So the precise request of phase shifter is reduced greatly.

Citation Download Citation

Shuchun Si, Yunshan Wang, Jianqiang Xu, Canlin Zhou, and Chengyong Gao "Calibration algorithm of unequal step phase-shifting based on checking", Proc. SPIE 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002, (29 April 2003); https://doi.org/10.1117/12.510259

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