Thermal measurement and analysis of micro devices using thermography

Y. Q. Gu; Ronghai Zhang; Dezhong Zhu

doi:10.1117/12.509876

29 April 2003 Thermal measurement and analysis of micro devices using thermography

Y. Q. Gu, Ronghai Zhang, Dezhong Zhu

Proceedings Volume 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002; (2003) https://doi.org/10.1117/12.509876
Event: Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002, 2002, Beijing, China

Abstract

Sensors and actuators become much smaller as parts of MEMS devices. Some of them run based on the thermal principle and thermal characteristics directly determine their performance. For example, micro-hotplate structures are incorporated into integrated gas sensors to heat the sensing thin film to a determinate temperature with a high sensitivity. The micro-machined accelerometer with no proof mass is based on free convection of a tiny hot air bubble in an enclosed chamber. The temperature profile of its heater is a key factor influencing the feature of the accelerometer. A thermally actuated membrane micro-pumpo can drive fluid by periodical heating of materials with different thermal expansion coefficients and consequent periodical vibration. An IR thermography with a microscopic set was applied in their thermal measurement to optimize these devices.

Citation Download Citation

Y. Q. Gu, Ronghai Zhang, and Dezhong Zhu "Thermal measurement and analysis of micro devices using thermography", Proc. SPIE 5058, Optical Technology and Image Processing for Fluids and Solids Diagnostics 2002, (29 April 2003); https://doi.org/10.1117/12.509876

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