Advanced HgCdTe focal plane arrays

Muren Chu; Hrayr K. Gurgenian; Shoghig Mesropian; Sevag Terterian; C.C. Wang; J. D. Benson; Jack H. Dinan; Latika S. R. Becker

doi:10.1117/12.485908

10 October 2003 Advanced HgCdTe focal plane arrays

Muren Chu, Hrayr K. Gurgenian, Shoghig Mesropian, Sevag Terterian, C.C. Wang, J. D. Benson, Jack H. Dinan, Latika S. R. Becker

Author Affiliations +

Proceedings Volume 5074, Infrared Technology and Applications XXIX; (2003) https://doi.org/10.1117/12.485908
Event: AeroSense 2003, 2003, Orlando, Florida, United States

Abstract

Boron implantation and heterojunction epitaxy have been the standard techniques for the production of HgCdTe focal plane arrays for a variety of applications. Each of these techniques has its special advantageous features. In this paper, we will describe an advanced HgCdTe junction formation technique, the planar ion-implantation-isolated heterojunction process, which utilizes the benefits of both the boron implantation and the heterojunction epitaxy techniques. HgCdTe arrays in the format of 320x256 and 640x512 have been produced by this method. The characteristics of these arrays are reported.

Citation Download Citation

Muren Chu, Hrayr K. Gurgenian, Shoghig Mesropian, Sevag Terterian, C.C. Wang, J. D. Benson, Jack H. Dinan, and Latika S. R. Becker "Advanced HgCdTe focal plane arrays", Proc. SPIE 5074, Infrared Technology and Applications XXIX, (10 October 2003); https://doi.org/10.1117/12.485908

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