Megapixel HgCdTe MWIR focal plane array with a 15-um pitch

Pierre Castelein; Francois Marion; Jean-Luc Martin; Jacques P. Baylet; Norbert Moussy; Olivier Gravrand; Alain Durand; Jean-Paul Chamonal; Gerard L. Destefanis

doi:10.1117/12.486880

10 October 2003 Megapixel HgCdTe MWIR focal plane array with a 15-μm pitch

Pierre Castelein, Francois Marion, Jean-Luc Martin, Jacques P. Baylet, Norbert Moussy, Olivier Gravrand, Alain Durand, Jean-Paul Chamonal, Gerard L. Destefanis

Author Affiliations +

Proceedings Volume 5074, Infrared Technology and Applications XXIX; (2003) https://doi.org/10.1117/12.486880
Event: AeroSense 2003, 2003, Orlando, Florida, United States

Abstract

In this paper we present the first demonstration at LETI infrared laboratory of a megapixel HgCdTe MWIR focal plane array with a 15μm pitch. The detectors were interconnected by indium bumps to the CMOS readout circuit. The design of these interconnections has been adapted from the standard CEA-LETI process to achieve resolution and uniformity required by the reduced pitch. Because of the mismatch of thermal dilatation coefficients between the substrate and the HgCdTe, specific developments were necessary in order to achieve the hybridization process with an extremely reduced amount of defaults. The readout circuit was designed in a 3.3V/0.35μm CMOS technology. Its main features were to allow the validation of the hybridization and technological processes. A Megapixel IRCMOS has been fully characterized at 77K exhibiting excellent electro-optical performances and an operability greater than 99.8%.

Citation Download Citation

Pierre Castelein, Francois Marion, Jean-Luc Martin, Jacques P. Baylet, Norbert Moussy, Olivier Gravrand, Alain Durand, Jean-Paul Chamonal, and Gerard L. Destefanis "Megapixel HgCdTe MWIR focal plane array with a 15-μm pitch", Proc. SPIE 5074, Infrared Technology and Applications XXIX, (10 October 2003); https://doi.org/10.1117/12.486880

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available