Pb(Zr,Ti)O3 ceramic thick films for optical device applications

J. Cardin; D. Leduc; C. Boisrobert; Hartmut W. Gundel

doi:10.1117/12.515798

8 August 2003 Pb(Zr,Ti)O₃ ceramic thick films for optical device applications

J. Cardin, D. Leduc, C. Boisrobert, Hartmut W. Gundel

Proceedings Volume 5122, Advanced Organic and Inorganic Optical Materials; (2003) https://doi.org/10.1117/12.515798
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

Ferroelectric Pb_xZr_yTi_1-yO₃ (PZT) has been prepared by chemical solution deposition (CSD) and spin-coating technique, using acetate and alkoxide precursors. Rapid thermal annealing has been employed in order to obtain crystallization in the perovskite phase. Aiming to study the optical properties of the films, PZT was deposited on different glass substrates. Structural characterization of the films was done by X-ray diffraction, morphology was investigated by SEM micrography. Using standard photography analysis, the films were qualified in terms of crack density, their appearance strongly depending on the type of substrate. Using a visible to the near infrared spectrophotometer, the transmittance normal to the surface of the films was studied. Coupling of laser light into the films by the M-lines technique allowed the determination of the refractive index and the thickness of the ferroelectric layer. A waveguiding interferometer structure of Mach-Zehnder type was realized by photolithography and wet chemical etching.

Citation Download Citation

J. Cardin, D. Leduc, C. Boisrobert, and Hartmut W. Gundel "Pb(Zr,Ti)O₃ ceramic thick films for optical device applications", Proc. SPIE 5122, Advanced Organic and Inorganic Optical Materials, (8 August 2003); https://doi.org/10.1117/12.515798

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