Heat properties of microelectronic heat flux sensors on the base of AgCuSe

Olexandra Hotra; Michael Semerak

doi:10.1117/12.517064

22 September 2003 Heat properties of microelectronic heat flux sensors on the base of AgCuSe

Olexandra Hotra, Michael Semerak

Proceedings Volume 5124, Optoelectronic and Electronic Sensors V; (2003) https://doi.org/10.1117/12.517064
Event: Optoelectronic and Electronic Sensors V, 2002, Rzeszow, Poland

Abstract

The results of calculation of temperature distribution in the structure of film sensor of heat flux and temperature are given in the paper. It is shown that heat physical and structure parameters of sensor effect on the gradient of sensor temperature field are what must be take into account at sensor design.

Citation Download Citation

Olexandra Hotra and Michael Semerak "Heat properties of microelectronic heat flux sensors on the base of AgCuSe", Proc. SPIE 5124, Optoelectronic and Electronic Sensors V, (22 September 2003); https://doi.org/10.1117/12.517064

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