Remotely microwave-enhanced wet anisotropic etching of monocrystalline silicon utilizing a memory effect of microwave activation of KOH

Rafal Walczak; Jan Dziuban

doi:10.1117/12.517062

22 September 2003 Remotely microwave-enhanced wet anisotropic etching of monocrystalline silicon utilizing a memory effect of microwave activation of KOH

Rafal Walczak, Jan Dziuban

Author Affiliations +

Proceedings Volume 5124, Optoelectronic and Electronic Sensors V; (2003) https://doi.org/10.1117/12.517062
Event: Optoelectronic and Electronic Sensors V, 2002, Rzeszow, Poland

Abstract

A new microwave enhanced anisotropic wet method of etching of silicon (External Etching Microwave Silicon - E2Msi), has been presented. In the method an etchant is irradiated by microwave and then flows to an external reaction chamber where etching is performed. The reaction chamber is situated outside of area of microwave irradiation. The main characteristics of E2Msi etching has been presented. It has been shown that the new process utilizes a memory effect of high chemical reactivity observed in water and water-based solution irradiated by microwave.

Citation Download Citation

Rafal Walczak and Jan Dziuban "Remotely microwave-enhanced wet anisotropic etching of monocrystalline silicon utilizing a memory effect of microwave activation of KOH", Proc. SPIE 5124, Optoelectronic and Electronic Sensors V, (22 September 2003); https://doi.org/10.1117/12.517062

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