Machine-tool-embedded white light interferometrical sensor for diameter measurements

Stefan Franz; Robert Windecker; Hans J. Tiziani

doi:10.1117/12.501072

30 May 2003 Machine-tool-embedded white light interferometrical sensor for diameter measurements

Stefan Franz, Robert Windecker, Hans J. Tiziani

Proceedings Volume 5144, Optical Measurement Systems for Industrial Inspection III; (2003) https://doi.org/10.1117/12.501072
Event: Optical Metrology, 2003, Munich, Germany

Abstract

We present an interferometrical setup and its application as a diameter measuring device in a machine tool. The optical setup is a folded Linnik interferometer. The proposed pen-like configuration is very space saving. The probing part of the sensor head fits bores from a diameter of 15 mm. The interferometer works with light of a short coherence length for unambiguous distance signals. The reference mirror is scanned by means of a tuning fork with a frequency of 1.1 kHz within a range of more than 0.2 mm. A design of a sensor head is given. The device can be fixed in the master chuck of a milling machine. The nominal diameter of the bores to be measured is preset to 40 mm, but it can be chosen from 20 mm to 55 mm using the given optical components by changing one internal distance. Measuring results show the capability of the device to analyze the position, the diameter and the shape of bores. The device can be used to establish a very fast quality control loop and therefore it will help to improve the efficiency of the production process.

Citation Download Citation

Stefan Franz, Robert Windecker, and Hans J. Tiziani "Machine-tool-embedded white light interferometrical sensor for diameter measurements", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); https://doi.org/10.1117/12.501072

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