Applications and potential of the mask structured ion exchange technique (MSI) in micro-optics

Jochen Baehr; Karl-Heinz Brenner

doi:10.1117/12.508781

10 November 2003 Applications and potential of the mask structured ion exchange technique (MSI) in micro-optics

Jochen Baehr, Karl-Heinz Brenner

Proceedings Volume 5177, Gradient Index, Miniature, and Diffractive Optical Systems III; (2003) https://doi.org/10.1117/12.508781
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The mask structured silver sodium ion exchange in glass (MSI) is a powerful tool for the realization of high precision refractive micro optical GRIN components. Commonly the distribution of the silver ions in GRIN elements and thus the index distribution is determined by the laws of thermal diffusion. By the use of a structured metal mask, which defines the areas of contact between the glass and the silver salt melt, an additional degree of freedom in optical design is introduced. A photolithographic pattern generator provides the accuracy of the mask structure to realize wave front optimized micro lens arrays with 100% filling factor in Cartesian, hexagonal and also in nearly any other arbitrary geometrical arrangements for several applications such as high precision Shack-Hartmann systems. In this paper we want to discuss the potential and limits of this technique. We report on the family of optical functions, which can be realized with MSI. Furthermore we give an overview over the actual applications.

Citation Download Citation

Jochen Baehr and Karl-Heinz Brenner "Applications and potential of the mask structured ion exchange technique (MSI) in micro-optics", Proc. SPIE 5177, Gradient Index, Miniature, and Diffractive Optical Systems III, (10 November 2003); https://doi.org/10.1117/12.508781

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available