Paper
14 November 2003 Laser-based spectrometry at NPL
Eric Usadi, Laura Crane
Author Affiliations +
Abstract
Traditional spectrophotometry, including regular and diffuse scattering measurements of reflected and transmitted light, employs lamp-based sources of radiation which are spectrally filtered by a spectrometer or by individual optical filters. Lasers offer distinct advantages to the traditional sources, most notably high spectral power and the possibility of very small irradiated area. NPL has established a new laser-based facility for reflectance and transmittance measurements which utilises NPL’s National Laser Radiation Facility, a suite of lasers covering a broad spectral range from the UV to the IR. This paper will highlight the capabilities of this new facility, discuss several of its unique design features, and present an analysis of the factors which influence its ultimate accuracy.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eric Usadi and Laura Crane "Laser-based spectrometry at NPL", Proc. SPIE 5192, Optical Diagnostic Methods for Inorganic Materials III, (14 November 2003); https://doi.org/10.1117/12.509179
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Sensors

Laser scattering

Scattering

Nanolithography

Scatter measurement

Transmittance

Solids

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