Compact electron-based EUV and ultrashort hard x-ray sources

Andre Egbert; Boris N. Chichkov

doi:10.1117/12.499589

7 January 2004 Compact electron-based EUV and ultrashort hard x-ray sources

Andre Egbert, Boris N. Chichkov

Proceedings Volume 5196, Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications; (2004) https://doi.org/10.1117/12.499589
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

A review of our progress in the realization of an ultrashort-pulse laser-driven hard-x-ray source based on the combination of a femtosecond laser system with an x-ray diode is given. New results on the development of electron-based compact EUV sources for "at-wavelength" metrology are presented. Detailed investigations of spectral, spatial, and temporal characteristics of both sources are performed and possible applications are discussed.

Citation Download Citation

Andre Egbert and Boris N. Chichkov "Compact electron-based EUV and ultrashort hard x-ray sources", Proc. SPIE 5196, Laser-Generated and Other Laboratory X-Ray and EUV Sources, Optics, and Applications, (7 January 2004); https://doi.org/10.1117/12.499589

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