Stiction problems in releasing 3D microstructures and the solution

Dongmin Wu; Nicholas Fang; Cheng Sun; Xiang Zhang

doi:10.1117/12.506644

20 October 2003 Stiction problems in releasing 3D microstructures and the solution

Dongmin Wu, Nicholas Fang, Cheng Sun, Xiang Zhang

Proceedings Volume 5225, Nano- and Micro-Optics for Information Systems; (2003) https://doi.org/10.1117/12.506644
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Micro-stereolithography (μSL) is capable of fabrication of highly complex three-dimensional (3D) microstructures by selectively photo-induced polymerization from the monomer resin. However, during the evaporative drying of structures from liquid resin, the 3D microstructures often collapse due to the capillary force. In this work, a theoretical model is developed to analyze the deflection and adhesion between thin polymer beams under capillary force. The detachment length of the test structures and adhesion energy of a typical μSL polymer (HDDA) are obtained experimentally which are important for MEMS structure design. Finally, we successfully developed a sublimation process to release the 3D microstructures without the adhesion.

Citation Download Citation

Dongmin Wu, Nicholas Fang, Cheng Sun, and Xiang Zhang "Stiction problems in releasing 3D microstructures and the solution", Proc. SPIE 5225, Nano- and Micro-Optics for Information Systems, (20 October 2003); https://doi.org/10.1117/12.506644

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