Paper
4 November 2003 Ablation processing of advanced materials by tailored femtosecond laser pulse
Author Affiliations +
Proceedings Volume 5226, 12th International School on Quantum Electronics: Laser Physics and Applications; (2003) https://doi.org/10.1117/12.519508
Event: 12th International School on Quantum Electronics Laser Physics and Applications, 2002, Varna, Bulgaria
Abstract
We have developed an automatic pulsewidth tunable femtosecond Ti:sapphire laser system that can generate an output of 50fs - 1ps and sub-mJ/pulse at a repetition rate of 1 kpps. The automatic pulse compressor enables one to control the pulsewidth in the range of 50fs - 1ps by use of a personal computer (PC). We describe our recent results of tailored ablation processing of advanced functional materials such as GaN, BN, and hydroxyapatite. By use of the femtosecond laser pulse tailored for a specific material, we have demonstrate precise material procesing without chemical composition change and heat affected zone. The fabrication of optical waveguide in fused silica is also described.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Minoru Obara and Peter A. Atanasov "Ablation processing of advanced materials by tailored femtosecond laser pulse", Proc. SPIE 5226, 12th International School on Quantum Electronics: Laser Physics and Applications, (4 November 2003); https://doi.org/10.1117/12.519508
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KEYWORDS
Laser ablation

Femtosecond phenomena

Etching

Gallium nitride

Waveguides

Sapphire lasers

Picosecond phenomena

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