Development of a 3-DOF in-parallel compliant micromotion stage for micromanipulation

Jingjun Yu; Shusheng Bi; Guanghua Zong

doi:10.1117/12.522201

2 September 2003 Development of a 3-DOF in-parallel compliant micromotion stage for micromanipulation

Jingjun Yu, Shusheng Bi, Guanghua Zong

Proceedings Volume 5253, Fifth International Symposium on Instrumentation and Control Technology; (2003) https://doi.org/10.1117/12.522201
Event: Fifth International Symposium on Instrumentation and Control Technology, 2003, Beijing, China

Abstract

This paper addresses the design and control issues of a novel micromanipulator which uses a 3-DOF parallel compliant mechanism driven by PZT actuators. Based on the pseudo-rigid-body model of the mechanism, both its conceptual design considerations and the final prototype are outlined first. In order to achieve a fine close-loop control for the PZT, a control law called Variable Speed Integral PI with Switched Parameters is employed based on a simplified but effective dynamic model of PZT actuators. Results from performance testing of the prototype compliant micromanipulator demonstrate that it has repeatability with less than 1 micron. The compliant stage is used as a high-precision bioengineering-oriented micromanipulator.

Citation Download Citation

Jingjun Yu, Shusheng Bi, and Guanghua Zong "Development of a 3-DOF in-parallel compliant micromotion stage for micromanipulation", Proc. SPIE 5253, Fifth International Symposium on Instrumentation and Control Technology, (2 September 2003); https://doi.org/10.1117/12.522201

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