Paper
25 March 2004 Porous silicon: a versatile optical material
Author Affiliations +
Proceedings Volume 5277, Photonics: Design, Technology, and Packaging; (2004) https://doi.org/10.1117/12.524715
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia
Abstract
We review a number of optical devices made from microporous silicon. Particular emphasis is placed on the fabrication method of porous silicon laser-mirrors, optical microcavities and one-dimensional photonic crystals with true photonic bandgap.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mike Gal, Peter J. Reece, Weihong Zheng, and Gilles Lerondel "Porous silicon: a versatile optical material", Proc. SPIE 5277, Photonics: Design, Technology, and Packaging, (25 March 2004); https://doi.org/10.1117/12.524715
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CITATIONS
Cited by 6 scholarly publications.
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KEYWORDS
Mirrors

Silicon

Reflectivity

Optical microcavities

Output couplers

Refractive index

Etching

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