Study of torsion-beam actuator based on low applied voltage

Wei Dong; Xin-Dong Zhang; Caixia Liu; Shuang Zhang; Hui Tan; Cuiping Jia; Jianxuan Pan; Buwen Xiao; Ping Ji; Baokun Xu; Wei-You Chen

doi:10.1117/12.519719

7 May 2004 Study of torsion-beam actuator based on low applied voltage

Wei Dong, Xin-Dong Zhang, Caixia Liu, Shuang Zhang, Hui Tan, Cuiping Jia, Jianxuan Pan, Buwen Xiao, Ping Ji, Baokun Xu, Wei-You Chen

Author Affiliations +

Proceedings Volume 5281, Optical Transmission, Switching, and Subsystems; (2004) https://doi.org/10.1117/12.519719
Event: Asia-Pacific Optical and Wireless Communications, 2003, Wuhan, China

Abstract

Micromechanical optical switch has a good quality for free-space optical cross connects, particularly in terms of the low insertion loss, low crosstalk, low polarization dependent loss (PDL), wavelength-independence, and bit-rate transparency. In research of micromechanical optical switches, the electrostatic torsion beam actuator is widely used. But this actuator needs high-applied voltage. In this paper, the actuator with the slant counter electrode was proposed and fabricated with tilted 3° (111) silicon wafer.

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Wei Dong, Xin-Dong Zhang, Caixia Liu, Shuang Zhang, Hui Tan, Cuiping Jia, Jianxuan Pan, Buwen Xiao, Ping Ji, Baokun Xu, and Wei-You Chen "Study of torsion-beam actuator based on low applied voltage", Proc. SPIE 5281, Optical Transmission, Switching, and Subsystems, (7 May 2004); https://doi.org/10.1117/12.519719

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