Fast measurements with a slow detector: photoacoustic investigations of 'steam' laser cleaning

Sergei I. Kudryashov; Susan D. Allen; Shishir Shukla

doi:10.1117/12.547980

15 July 2004 Fast measurements with a slow detector: photoacoustic investigations of "steam" laser cleaning

Sergei I. Kudryashov, Susan D. Allen, Shishir Shukla

Proceedings Volume 5339, Photon Processing in Microelectronics and Photonics III; (2004) https://doi.org/10.1117/12.547980
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States

Abstract

The dynamics of explosive boiling of a 2-propanol layer of variable thickness on a Si substrate heated by a nanosecond KrF excimer laser was studied using a contact photoacoustic technique. The transition from acoustic generation at a free Si boundary to that at a rigid alcohol/Si boundary accompanied by a sharp increase of acoustic generation efficiency was found above a laser fluence threshold of 0.17 J/cm² and a liquid layer thickness greater than 0.25 μm due to subnanosecond near-critical explosive boiling of the superheated liquid layer near the hot absorbing Si substrate. The gradual increase of the photoacoustic response of the superheated alcohol with increasing thickness of the liquid film at fluences above the explosive boiling threshold was attributed to the fluence- and time-dependent increase of the area undergoing explosive boiling.

Citation Download Citation

Sergei I. Kudryashov, Susan D. Allen, and Shishir Shukla "Fast measurements with a slow detector: photoacoustic investigations of "steam" laser cleaning", Proc. SPIE 5339, Photon Processing in Microelectronics and Photonics III, (15 July 2004); https://doi.org/10.1117/12.547980

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