Three-dimensional microfabrication using two-photon absorption by femtosecond laser

Shin Wook Yi; Seong Ku Lee; Hong Jin Kong; Dong-Yol Yang; Sang-hu Park; Tae-woo Lim; Ran Hee Kim; Kwang-Sup Lee

doi:10.1117/12.524310

30 December 2003 Three-dimensional microfabrication using two-photon absorption by femtosecond laser

Shin Wook Yi, Seong Ku Lee, Hong Jin Kong, Dong-Yol Yang, Sang-hu Park, Tae-woo Lim, Ran Hee Kim, Kwang-Sup Lee

Proceedings Volume 5342, Micromachining and Microfabrication Process Technology IX; (2003) https://doi.org/10.1117/12.524310
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

As a femtosecond laser has recently been developed, both of high power and high photon density are easily obtained. The high photon density results in photopolymerization of urethane acrylate resin whose absorption spectrum is shorter than that of the femtosecond laser. The stereo-lithography using the two-photon absorption (TPA) makes micro structures with great resolution. We used this phenomenon to make micron-sized structures with sub-micron resolution. Before fabricating 3-D structures, precise 2-D structures were preceded. The TPA photopolymerization was applied of poly-dimethyl siloxane (PDMS) molding. In this paper, we report the recent progress and application of this technology in our laboratory.

Citation Download Citation

Shin Wook Yi, Seong Ku Lee, Hong Jin Kong, Dong-Yol Yang, Sang-hu Park, Tae-woo Lim, Ran Hee Kim, and Kwang-Sup Lee "Three-dimensional microfabrication using two-photon absorption by femtosecond laser", Proc. SPIE 5342, Micromachining and Microfabrication Process Technology IX, (30 December 2003); https://doi.org/10.1117/12.524310

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available