Improvement in reliability of MEMS resonator using multi-layers

Prakash R. Apte; Priyadarshan U Patankar; Nilesh S Birari

doi:10.1117/12.524442

23 December 2003 Improvement in reliability of MEMS resonator using multilayers

Prakash R. Apte, Priyadarshan U Patankar, Nilesh S Birari

Proceedings Volume 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III; (2003) https://doi.org/10.1117/12.524442
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

Many promising applications of MEMS based devices are in critical systems. Hence, their reliability has become an important issue. The techniques used for the fabrication of these devices give rise to large residual stresses. This coupled with their high speeds of operation make them prone to fatigue failure. The focus of this work is the improvement of reliability under fatigue loading using multi-layers. This paper demonstrates that by adjusting the thickness ratios, the stress in a multi-layered resonator can be prevented from alternating. Moreover, the peak stress can be minimized and performance can be improved in harsh environments.

Citation Download Citation

Prakash R. Apte, Priyadarshan U Patankar, and Nilesh S Birari "Improvement in reliability of MEMS resonator using multilayers", Proc. SPIE 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III, (23 December 2003); https://doi.org/10.1117/12.524442

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