Emerging MEMS technology and applications

Bishnu P. Gogoi

doi:10.1117/12.538381

24 January 2004 Emerging MEMS technology and applications

Bishnu P. Gogoi

Proceedings Volume 5344, MEMS/MOEMS Components and Their Applications; (2004) https://doi.org/10.1117/12.538381
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

MEMS technology, derived from the microelectronics industry, has enabled the manufacture of high volume sensors and actuators. However, the technology path for standard CMOS technology is smaller geometries, planar topology, and lower thermal budgets, while MEMS process technology have been moving towards high aspect features, high thermal budgets and non-aggressive lithography requirements. This has important implications for the viability of MEMS to be a mainstream technology that can support the products of a new generation of products and applications. This paper will review some of the emerging trends in MEMS technology and discuss some of the applications. The challenges in ensuring the manufacturing viability of MEMS technology will also be briefly discussed.

Citation Download Citation

Bishnu P. Gogoi "Emerging MEMS technology and applications", Proc. SPIE 5344, MEMS/MOEMS Components and Their Applications, (24 January 2004); https://doi.org/10.1117/12.538381

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