Dynamic behavior of high-speed silicon nitride deformable mirrors

Phillip A. Himmer; David L. Dickensheets

doi:10.1117/12.525509

24 January 2004 Dynamic behavior of high-speed silicon nitride deformable mirrors

Phillip A. Himmer, David L. Dickensheets

Proceedings Volume 5348, MOEMS Display and Imaging Systems II; (2004) https://doi.org/10.1117/12.525509
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

This paper presents experimental data illustrating the dynamic behavior of micromachined deformable mirrors operated as cyclical focus control elements. The mirrors used for this study are circular silicon nitride membranes 1 mm in diameter with a fundamental resonance at 144 kHz and a quality factor in air of 0.86. Electrostatic actuation of the mirrors is provided by two concentric electrodes to control focus and spherical aberration. Mirror displacement has been characterized in terms of frequency response and dynamic surface figure. Surface shape was examined for variation with frequency over a range from 1 kHz to 180 kHz for small mirror deflection. Intra-cycle variation of both quartic and quadratic surface curvature terms was also measured at 60 kHz. Surface figure data are presented showing less than λ/10 spherical aberration for a mirror operating at 10 kHz with a focal length varying cyclically from ∞ to 32 mm.

Citation Download Citation

Phillip A. Himmer and David L. Dickensheets "Dynamic behavior of high-speed silicon nitride deformable mirrors", Proc. SPIE 5348, MOEMS Display and Imaging Systems II, (24 January 2004); https://doi.org/10.1117/12.525509

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