157-nm chromeless phase lithography with extremely high numerical aperture

Kunio Watanabe; Takuya Hagiwara; Seiji Matsuura; Toshifumi Suganaga; Toshiro Itani; Kiyoshi Fujii

doi:10.1117/12.535150

28 May 2004 157-nm chromeless phase lithography with extremely high numerical aperture

Kunio Watanabe, Takuya Hagiwara, Seiji Matsuura, Toshifumi Suganaga , Toshiro Itani , Kiyoshi Fujii

Proceedings Volume 5377, Optical Microlithography XVII; (2004) https://doi.org/10.1117/12.535150
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

Chromeless Phase Lithography is known as an effective resolution enhancement technique for isolated line patterns. We fabricated a chromeless phase lithography mask for 157-nm lithography, and evaluated the lithographic performance using a 0.90 numerical aperture 157-nm microstepper. To obtain the best resolution, illumination condition was optimized to conventional illumination with 0.7 partial coherence (σ) using lithography simulation. In the exposure experiment, 30-nm-wide isolated line, 30-nm-wide 140-nm-pitch line-and-space, and 30-nm-wide static random access memory (SRAM) gate patterns were resolved. Further lithography simulation results indicated that the resolution limit of 24-nm would be obtained by eliminating the image degradation factors such as the aberration, flare, and central obscuration.

Citation Download Citation

Kunio Watanabe, Takuya Hagiwara, Seiji Matsuura, Toshifumi Suganaga , Toshiro Itani , and Kiyoshi Fujii "157-nm chromeless phase lithography with extremely high numerical aperture", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); https://doi.org/10.1117/12.535150

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available