Paper
26 July 2004 Prediction of the applicability of active damping elements in high-precision machines
Jan Holterman, Theo J. A. de Vries
Author Affiliations +
Abstract
The Smart Disc project at the Drebbel Institute of the University of Twente is aimed at the development of active structural elements for high-precision machines. The active elements consist of a piezoelectric position actuator and a collocated piezoelectric force sensor. As the actuators and sensors are collocated, the elements are especially suited for implementing robust active damping. The decision whether or not to incorporate active damping elements in a high-precision machine should ideally be made in an early design stage, i.e., at a time at which only limited knowledge of the vibration problem is available. Despite the uncertainties that may exist at that stage, one would like to be able to roughly predict the amount of damping that could possibly be obtained. For that reason, the present paper is concerned with the development of an analysis tool that may help in predicting the applicability of active damping elements in a mechanical structure of which only a rough model is available. Based on extensive simulations, several practical rules of thumb are given for the requirements for the mechanical structure and the active elements, in order to enable the realisation of relative damping values as high as 10%.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jan Holterman and Theo J. A. de Vries "Prediction of the applicability of active damping elements in high-precision machines", Proc. SPIE 5383, Smart Structures and Materials 2004: Modeling, Signal Processing, and Control, (26 July 2004); https://doi.org/10.1117/12.538927
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KEYWORDS
Actuators

Sensors

Performance modeling

Cesium

Hassium

Optical lithography

Velocity measurements

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