Theoretical modeling of the operational mechanism of a photoconductive MEMS spatial light modulator under AC and DC bias

Jed Khoury; Charles L. Woods; B. Haji-Saeed; S. K. Sengupta; Dalila B. Megherbi; W. D. Goodhue; John Kierstead

doi:10.1117/12.548074

12 April 2004 Theoretical modeling of the operational mechanism of a photoconductive MEMS spatial light modulator under AC and DC bias

Jed Khoury, Charles L. Woods, B. Haji-Saeed, S. K. Sengupta, Dalila B. Megherbi, W. D. Goodhue, John Kierstead

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Proceedings Volume 5437, Optical Pattern Recognition XV; (2004) https://doi.org/10.1117/12.548074
Event: Defense and Security, 2004, Orlando, Florida, United States

Abstract

This paper analyzes the operation of a new optically addressed deformable mirror device for applications in adaptive optics and optical signal processing. Device operation utilizes a pixellated metallized polymeric membrane mirror supported above an optically addressed photoconductive substrate. A grid of patterned photoresist supports the metallized membrane. A conductive ZnO layer is placed on the backside of the substrate. The device operates as an impedance distribution between two cascaded impedances between the deformable membrane and substrate and the substrate and back electrode. We develop a theoretical model to analyze the deformation as a function of the light intensity and electrical drive

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Jed Khoury, Charles L. Woods, B. Haji-Saeed, S. K. Sengupta, Dalila B. Megherbi, W. D. Goodhue, and John Kierstead "Theoretical modeling of the operational mechanism of a photoconductive MEMS spatial light modulator under AC and DC bias", Proc. SPIE 5437, Optical Pattern Recognition XV, (12 April 2004); https://doi.org/10.1117/12.548074

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KEYWORDS

Microelectromechanical systems

Mirrors

Capacitors

Electrodes

Adaptive optics

Deformable mirrors

Modulation

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