An electrically tunable infrared filter on base of Fabry-Perot interferometer

Steffen Kurth; Karla Hiller; Norbert Neumann; Matthias Heinze; Wolfram Doetzel; Thomas Gessner

doi:10.1117/12.558124

7 April 2004 An electrically tunable infrared filter on base of Fabry-Perot interferometer

Steffen Kurth, Karla Hiller, Norbert Neumann, Matthias Heinze, Wolfram Doetzel, Thomas Gessner

Proceedings Volume 5445, Microwave and Optical Technology 2003; (2004) https://doi.org/10.1117/12.558124
Event: Microwave and Optical Technology 2003, 2003, Ostrava, Czech Republic

Abstract

This contribution deals with design, fabrication and test of a micromachined Fabry-Perot-Interferometer in first order configuration. Main application fields are chemical analysis, infrared sensing and spectral imaging. Some of the most important properties of a FPI filter are the full width half maximum (FWHM) and the tunable spectral range which are generally limited by the curvature and tilt of the mirrors and by their reflectance.

Citation Download Citation

Steffen Kurth, Karla Hiller, Norbert Neumann, Matthias Heinze, Wolfram Doetzel, and Thomas Gessner "An electrically tunable infrared filter on base of Fabry-Perot interferometer", Proc. SPIE 5445, Microwave and Optical Technology 2003, (7 April 2004); https://doi.org/10.1117/12.558124

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