Paper
15 September 2004 Mach-Zehnder channel-guide device structure based on 2D photonic crystal
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Abstract
We have fabricated and measured 2D photonic crystal Mach-Zehnder device structures using W1 channel waveguides oriented along GK directions in AlGaAs/GaAs epitaxial waveguide material and silicon-on-insulator waveguide material, with operation at wavelengths around 1550 nm. 2D FDTD simulations and experimental results will be shown and compared. The structure has been designed using progressive tapering of the hole diameter in the bend regions, while a 'defect' hole with reduced radius has been placed in the centre of the Y-Junction, giving a substantial improvement in the transmission and bandwidth. The overall length of the photonic crystal Mach-Zehnder structure is typically about 32 um and the structure has been fabricated using a combination of direct-write electron-beam lithography (EBL) and dry-etch processing. Devices were measured using a tunable laser with end-fire coupling. We shall describe the application of such structures for switching and sensing, with deliberate exploitation of the thermo-optic effect via the incorporation of heater electrodes.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Edilson A. Camargo, Harold M. H. Chong, and Richard M. De La Rue "Mach-Zehnder channel-guide device structure based on 2D photonic crystal", Proc. SPIE 5450, Photonic Crystal Materials and Nanostructures, (15 September 2004); https://doi.org/10.1117/12.545719
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Cited by 2 scholarly publications.
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KEYWORDS
Etching

Photonic crystals

Switching

Thermal optics

Silicon

Waveguides

Electron beam lithography

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