UV and DUV microscopy for dimensional metrology on micro- and nano-structures

Bernd Bodermann; Gerd Ehret; Werner Mirande

doi:10.1117/12.554747

10 September 2004 UV and DUV microscopy for dimensional metrology on micro- and nano-structures

Bernd Bodermann, Gerd Ehret, Werner Mirande

Proceedings Volume 5457, Optical Metrology in Production Engineering; (2004) https://doi.org/10.1117/12.554747
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

Inspection and linewidths measurements of subwavelength structures using optical microscopy are severely confined both by the limited resolution and by a manifold of light-structure interactions affecting the optical image. A straightforward way to improve the resolution is the reduction of the wavelength of the imaging radiation to the UV or DUV spectral range. But changing the wavelength will be accomplished by a modification also of the interaction between the light and the specimen. This modification also affects the contrast mechanism and therewith also the signal to noise ratio for various microscopy methods in a different way. Additionally the quality of the structure edge localisation may be affected due to changing field displacement effects in the field structure interaction. We investigated theoretically the changes of the contrast mechanisms for different microscopy methods between visible, UV and DUV microscopy for different materials like Chrome, SiO₂ or Silicon. The investigated methods are bright field reflection microscopy, confocal microscopy and a newly developed dark field method using alternating grazing incidence illumination. The calculations are based on rigorous diffraction calculation.

Citation Download Citation

Bernd Bodermann, Gerd Ehret, and Werner Mirande "UV and DUV microscopy for dimensional metrology on micro- and nano-structures", Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); https://doi.org/10.1117/12.554747

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available