Paper
17 August 2004 Tomographic microinterferometry of refractive index distribution
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Abstract
Tomographic microinterferometry allows for a fast determination of the 3D refractive index distribution in optical elements. In this paper the limitations of this method due to diffraction effects at the edges of microelements or the steps in refractive index distribution inside objects with dimensions comparable to the wavelength are experimentally analyzed and by FDTD based simulations of reconstruction process. The other limitation considered refers to the deviation from a straight light propagation condition assumed in tomographic reconstruction. This problem is analyzed on the base of an experimental analysis of a 3D refractive index distribution in gradient index fiber optics and grin lens. The further modifications of tomographic microinterferometry in order to decrease these limitations are discussed.
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Pawel Kniazewski, Malgorzata Kujawinska, Heidi Ottevaere, and Hugo Thienpont "Tomographic microinterferometry of refractive index distribution", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); https://doi.org/10.1117/12.545553
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KEYWORDS
Refractive index

Tomography

Reconstruction algorithms

3D metrology

Diffraction

Cladding

Numerical simulations

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