Excimer lamps: history, discharge physics, and industrial applications

Ulrich Kogelschatz

doi:10.1117/12.563006

3 May 2004 Excimer lamps: history, discharge physics, and industrial applications

Ulrich Kogelschatz

Proceedings Volume 5483, Atomic and Molecular Pulsed Lasers V; (2004) https://doi.org/10.1117/12.563006
Event: Atomic and Molecular Pulsed Lasers V, 2003, Tomsk, Russian Federation

Abstract

The development of modern excimer lamps (excilamps) is reviewed. These lamps provide high intensity ultraviolet (UV) of vacuum ultraviolet (VUV) radiation generated by decaying excimer complexes formed in various non-equilibrium discharges. Due to the absence of self-absorption in the plasma this process can be highly efficient and tolerates high power loadings. With different fill gases narrow-band radiation at various UV and VUV wavelengths can be obtained. Phosphor coatings can be used to obtain visible radiation. Cylindrical as well as flat planar configurations are used to provide high photon fluxes over large areas. The special characteristics of excimer lamps led to a number of novel applications for low-temperature materials processing (oxidation, deposition, annealing, etching, cleaning, micro-structuring) and to applications in photochemical purification of air and water using advanced oxidation processes (AOPs) based on O₂ and H₂O photolysis. Further applications are expected in analytical instrumentation.

Citation Download Citation

Ulrich Kogelschatz "Excimer lamps: history, discharge physics, and industrial applications", Proc. SPIE 5483, Atomic and Molecular Pulsed Lasers V, (3 May 2004); https://doi.org/10.1117/12.563006

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