Fabrication and characterization of phonon-cooled hot-electron bolometers on freestanding 2-µm silicon nitride membranes for THz applications

Pedro Pablo Munoz; Sven Bedorf; Michael Brandt; Thomas Tils; Netty Honingh; Karl Jacobs

doi:10.1117/12.550104

8 October 2004 Fabrication and characterization of phonon-cooled hot-electron bolometers on freestanding 2-μm silicon nitride membranes for THz applications

Pedro Pablo Munoz, Sven Bedorf, Michael Brandt, Thomas Tils, Netty Honingh, Karl Jacobs

Author Affiliations +

Proceedings Volume 5498, Millimeter and Submillimeter Detectors for Astronomy II; (2004) https://doi.org/10.1117/12.550104
Event: SPIE Astronomical Telescopes + Instrumentation, 2004, Glasgow, United Kingdom

Abstract

Superconducting phonon-cooled hot-electron bolometer (HEB) mixers are promising heterodyne detectors for THz frequencies. KOSMA is working to develop a heterodyne receiver for the GREAT receiver on SOFIA for observation at 1.7-1.9 THz using waveguide mixers. Waveguide mixers at these frequencies require very thin device substrates. We report on recent progress in fabricating and characterizing mixers on 2μm thick silicon nitride membranes which are suspended in a substrate channel. Heterodyne measurements with receiver noise temperatures of 1000K at 800GHz RF and 1GHz IF, at a 4.2K bath temperature show that fabrication of phonon-cooled HEBs on membranes is possible with a good noise performance. The HEB device was fabricated at KOSMA and consists of a 3-5nm thin NbTiN film on an AlN buffer layer.

Citation Download Citation

Pedro Pablo Munoz, Sven Bedorf, Michael Brandt, Thomas Tils, Netty Honingh, and Karl Jacobs "Fabrication and characterization of phonon-cooled hot-electron bolometers on freestanding 2-μm silicon nitride membranes for THz applications", Proc. SPIE 5498, Millimeter and Submillimeter Detectors for Astronomy II, (8 October 2004); https://doi.org/10.1117/12.550104

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