Paper
15 October 2004 Optical properties of contaminant droplets
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Abstract
Novel light scattering properties of molecular films in a “droplet” configuration are presented and discussed. The illuminated films are shown to disappear when viewed at particular angles. The phenomenon is discussed in the context of Germer’s analysis of out-of-plane scattering from particles and surface micro-roughness.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kenneth T. Luey, Randy M. Villahermosa, and Dianne J. Coleman "Optical properties of contaminant droplets", Proc. SPIE 5526, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control, (15 October 2004); https://doi.org/10.1117/12.558223
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Cited by 1 scholarly publication.
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KEYWORDS
Light scattering

Scattering

Polishing

Silicon

Particles

Aluminum

Silica

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