Optical detection of angular acceleration rate for MEMS-based gyroscopes

Vahe Nerguizian; Ali Qobadian-Kalhor; Muthukumaran Packirisamy; Ion G. Stiharu

doi:10.1117/12.567425

20 December 2004 Optical detection of angular acceleration rate for MEMS-based gyroscopes

Vahe Nerguizian, Ali Qobadian-Kalhor, Muthukumaran Packirisamy, Ion G. Stiharu

Proceedings Volume 5577, Photonics North 2004: Optical Components and Devices; (2004) https://doi.org/10.1117/12.567425
Event: Photonics North, 2004, Ottawa, Ontario, Canada

Abstract

This paper explores a novel way of sensing the angular velocity rate change of MEMS based gyroscopes with optical methods. In the capacitive sensing mechanism, displacement due to angular rate induces differential capacitance, requiring many supporting filtering and amplification sub-systems and circuits in the device to eliminate the noise. One of the most important aspects of using optical sensing elements with MEMS technology is the elimination of capacitive sensing used in conventional MEMS based gyroscopes. Conventional bulky optical gyroscopes based on Sagnac effect, with very small drift-rate parameters, is difficult to be implemented with MEMS technology due to the requirement of large area enclosed by the laser ring and fiber optic paths. Light interference effect of optical properties can permit the phase shift measurement of the light wavelength. In this paper, the combination of optical and mechanical systems is studied for estimating angular acceleration rate by Coriolis Effect.

Citation Download Citation

Vahe Nerguizian, Ali Qobadian-Kalhor, Muthukumaran Packirisamy, and Ion G. Stiharu "Optical detection of angular acceleration rate for MEMS-based gyroscopes", Proc. SPIE 5577, Photonics North 2004: Optical Components and Devices, (20 December 2004); https://doi.org/10.1117/12.567425

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available