A surface micromachined amorphous GexSi1-xOy bolometer for thermal imaging applications

A. H. Z. Ahmed; R. N. Tait; Tania B. Oogarah; H. C. Liu; Mike W. Denhoff; G. I. Sproule; M. J. Graham

doi:10.1117/12.567612

9 December 2004 A surface micromachined amorphous Ge_xSi_1-xO_y bolometer for thermal imaging applications

A. H. Z. Ahmed, R. N. Tait, Tania B. Oogarah, H. C. Liu, Mike W. Denhoff, G. I. Sproule, M. J. Graham

Proceedings Volume 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education; (2004) https://doi.org/10.1117/12.567612
Event: Photonics North, 2004, Ottawa, Ontario, Canada

Abstract

We present characterization of a surface micro-machined microbolometer featuring a number of unique features. The active resistor layer is amorphous Ge_xSi_1-xO_y grown by reactively co-sputtering Ge and Si in an oxygen background. Complete control over Ge, Si, and O content using this technique allows control of both temperature coefficient of resistance and resistivity of the material, enabling optimization of material characteristics for bolometer applications. The resistor layer is combined with top and bottom NiCr metalization to form a tuned absorber for 10 μm radiation, eliminating requirements for additional absorber layers or for carefully controlled air gap thickness. Characterization of device noise and performance is presented.

Citation Download Citation

A. H. Z. Ahmed, R. N. Tait, Tania B. Oogarah, H. C. Liu, Mike W. Denhoff, G. I. Sproule, and M. J. Graham "A surface micromachined amorphous Ge_xSi_1-xO_y bolometer for thermal imaging applications", Proc. SPIE 5578, Photonics North 2004: Photonic Applications in Astronomy, Biomedicine, Imaging, Materials Processing, and Education, (9 December 2004); https://doi.org/10.1117/12.567612

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available